Publication detail

Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization

ČECH, V.

Original Title

Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization

Type

journal article - other

Language

English

Original Abstract

Thin plasma polymer films were deposited from a mixture of dichloro(methyl)phenylsilane vapor and gaseous hydrogen in an RF capacitive coupling deposition system on pieces of silicon wafers.

Key words in English

thin films, plasma polymerization,thermogravimetric analysis, FTIR, ESCA/XPS

Authors

ČECH, V.

RIV year

2001

Released

1. 1. 2001

ISBN

0021-8995

Periodical

Journal of Applied Polymer Sciences

Year of study

82

Number

9

State

United States of America

Pages from

2106

Pages to

2112

Pages count

7

BibTex

@article{BUT39848,
  author="Vladimír {Čech}",
  title="Analysis of Annealed Thin Polymer Films Prepared from Dichloro(methyl)phenylsilane by Plasma Polymerization",
  journal="Journal of Applied Polymer Sciences",
  year="2001",
  volume="82",
  number="9",
  pages="7",
  issn="0021-8995"
}