COMPLEX APPROACH TO SURFACE RECONSTRUCTION OF MICROSCOPIC SAMPLES FROM BIMODAL IMAGE STEREO DATA

journal article - other

English

The paper describes a set of approaches and methods enabling robust and relatively precise stereo-analysis-based surface reconstruction in scanning electron microscopy (SEM). The paper primarily deals with the disparity analysis problem, namely with a selection of a suitable similarity criterion to be used for finding image correspondences. Search-and-match method (as opposite to feature based analysis) is shown as probably the only practical in the given environment of SEM when no prior constrains to the surface type are allowed. Extensive comparison of some common and newly suggested similarity criteria led to the conclusion that the designed angle criterion is the only so far acceptable as much as the error rate concerns. Using the criterion has been shown equivalent to applying a non-linear two-dimensional matched filter, which enables efficient frequency domain implementation in the form of a linear matched filter modification. An important improvement in reliability of computed disparities has been achieved by using both available imaging modalities (back-scattered electrons – BEI and secondary electrons – SEI) thus providing vector image data. Expressing the criterion for the vector case in terms of both individual scalar cases cuts the computational requirements to a half besides allowing for an additional reliability criterion - comparison of three different though partly dependent criteria. On the second place, the complex approach includes also solutions of problems, which may seem marginal but are important for practical success of the analysis. Recent improvements, solving some of these specific problems of SEM stereo analysis, are discussed as well. The paper summarises present state of the several-years development of the method, the partial descriptions of which can be found scattered in previous publications devoted to individual specific problems.

stereo vision, surface reconstraction, scanning electron microscopy, disparity analysis

JAN, J., JANOVÁ, D.

2002

1. 1. 2002

1230-0535

Machine Graphics and Vision

10

3

Republic of Poland

261

288

28