Publication detail

Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams

LOPOUR, F., ŠIKOLA, T., SPOUSTA, J., DITTRICHOVÁ, L., BÁBOR, P., DUARTE, J., MATĚJKA, F.

Original Title

Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams

Type

conference paper

Language

English

Original Abstract

Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams

Key words in English

Microstructures, SPM

Authors

LOPOUR, F., ŠIKOLA, T., SPOUSTA, J., DITTRICHOVÁ, L., BÁBOR, P., DUARTE, J., MATĚJKA, F.

RIV year

2001

Released

19. 4. 2000

Publisher

Editors: B. Michel, T. Winkler, M. Werner,H. Fecht

Location

Berlin

Pages from

919

Pages to

922

Pages count

4

BibTex

@inproceedings{BUT4036,
  author="Filip {Lopour} and Tomáš {Šikola} and Jiří {Spousta} and Libuše {Dittrichová} and Petr {Bábor} and Juan {Duarte} and František {Matějka}",
  title="Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams",
  booktitle="MicroMat 2000",
  year="2000",
  pages="4",
  publisher="Editors: B. Michel, T. Winkler, M. Werner,H. Fecht",
  address="Berlin"
}