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CHMELÍK, R., HARNA, Z.
Original Title
Surface profilometry by a parallel-mode confocal microscope
Type
journal article - other
Language
English
Original Abstract
Confocal imaging by a parallel-mode confocal mi-croscope is based on the real-time incoherent-holography technique. Besides the image amplitude, the image phase is inherently reconstructed. In this paper we prove that the phase image component can be converted into the height map, and, in this way, we measure the surface profile with the precision of several nanometers. Small height differences can be measured inside one optical section of the specimen surface, while the measurement of large differences needs to connect more optical sections. The two procedures are demonstrated experimentally even for the surface with large and steep height changes. The ambiguity in the height determination from the image phase component is overcome by means of the depth discrimination property of the microscope. The axial resolution is improved using broadband illumination.
Keywords
holography applications; profilometry; confocal microscopy.
Authors
RIV year
2002
Released
1. 4. 2002
ISBN
0091-3286
Periodical
Optical Engineering
Year of study
41
Number
4
State
United States of America
Pages from
744
Pages to
745
Pages count
2
URL
areálová knihovna FSI
BibTex
@article{BUT40858, author="Radim {Chmelík} and Zdeněk {Harna}", title="Surface profilometry by a parallel-mode confocal microscope", journal="Optical Engineering", year="2002", volume="41", number="4", pages="2", issn="0091-3286", url="areálová knihovna FSI" }