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LLOBET, E. IVANOV, P. VILANOVA, X. BREZMES, J. HUBÁLEK, J. MALYSZ, K. GRACIA, I. CANÉ, C. CORREIG, X.
Original Title
Screen-printed nanoparticle tin oxide films for high-yield sensor systems
Type
journal article - other
Language
English
Original Abstract
By means of s screen-printing technique, sensitive layers of nanopowder tin oxide were deposited on silicon micromachined substrates. The thickness of the sensing layers was 5um and particle size was around 40nm. The deposition method overcomes disadvantages such as low porosity and low surface area, generally associated to chemical vapour deposition or sputtering methods, and keeps power consumption low(80mW for working temperature of 480C). With fuzzy neural network, it is posible to identify the different species measured (success rate was higher than 91%).
Key words in English
Micromachined gas sensor; Screen-printing; Tin oxide; Nanopowder; Volatile organic compounds
Authors
LLOBET, E.; IVANOV, P.; VILANOVA, X.; BREZMES, J.; HUBÁLEK, J.; MALYSZ, K.; GRACIA, I.; CANÉ, C.; CORREIG, X.
RIV year
2003
Released
14. 5. 2003
ISBN
0925-4005
Periodical
Sensors and Actuators B: Chemical
Year of study
96
Number
1
State
Swiss Confederation
Pages from
94
Pages to
104
Pages count
11
BibTex
@{BUT187042 }