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MIKA, F. RYŠÁVKA, J. LOPOUR, F. ZADRAŽIL, M. MÜLLEROVÁ, I. FRANK, L.
Original Title
Computer Controlled Low Energy SEM
Type
journal article - other
Language
English
Original Abstract
In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualization of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. There fore software for the determination of the critical energy was implemented to the comercial SEM microscope. First results are presented here.
Key words in English
SEM, non-conductors, critical energy
Authors
MIKA, F.; RYŠÁVKA, J.; LOPOUR, F.; ZADRAŽIL, M.; MÜLLEROVÁ, I.; FRANK, L.
Released
7. 9. 2003
Pages from
116
Pages to
117
Pages count
2
BibTex
@article{BUT41446, author="Filip {Mika} and Josef {Ryšávka} and Filip {Lopour} and Martin {Zadražil} and Ilona {Müllerová} and Luděk {Frank}", title="Computer Controlled Low Energy SEM", year="2003", volume="9", number="3", pages="2" }