Publication detail

Computer Controlled Low Energy SEM

MIKA, F. RYŠÁVKA, J. LOPOUR, F. ZADRAŽIL, M. MÜLLEROVÁ, I. FRANK, L.

Original Title

Computer Controlled Low Energy SEM

Type

journal article - other

Language

English

Original Abstract

In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualization of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. There fore software for the determination of the critical energy was implemented to the comercial SEM microscope. First results are presented here.

Key words in English

SEM, non-conductors, critical energy

Authors

MIKA, F.; RYŠÁVKA, J.; LOPOUR, F.; ZADRAŽIL, M.; MÜLLEROVÁ, I.; FRANK, L.

Released

7. 9. 2003

Pages from

116

Pages to

117

Pages count

2

BibTex

@article{BUT41446,
  author="Filip {Mika} and Josef {Ryšávka} and Filip {Lopour} and Martin {Zadražil} and Ilona {Müllerová} and Luděk {Frank}",
  title="Computer Controlled Low Energy SEM",
  year="2003",
  volume="9",
  number="3",
  pages="2"
}