Publication detail

Surface profilometry by a holographic confocal microscopy

CHMELÍK, R., LOVICAR, L., HARNA, Z.

Original Title

Surface profilometry by a holographic confocal microscopy

Type

journal article - other

Language

English

Original Abstract

Confocal imaging by a holographic confocal microscope is based on the real-time incoherent holography. Besides the image amplitude, the image phase is inherently reconstructed. In this paper, we demonstrate that the phase image component can be converted into the height map of the specimen surface, and, in this way, we can measure the surface profile with the precision of several nanometers. The possible ambiguity in the height determination of large height steps is overcome owing to the depth discrimination property of the microscope. The axial resolution required for this purpose is achieved using broadband illumination.

Keywords

holography applications; profilometry; confocal microscopy.

Authors

CHMELÍK, R., LOVICAR, L., HARNA, Z.

RIV year

2003

Released

1. 1. 2003

ISBN

0078-5466

Periodical

Optica Applicata

Year of study

33

Number

2-3

State

Republic of Poland

Pages from

381

Pages to

389

Pages count

9

BibTex

@article{BUT41935,
  author="Radim {Chmelík} and Luděk {Lovicar} and Zdeněk {Harna}",
  title="Surface profilometry by a holographic confocal microscopy",
  journal="Optica Applicata",
  year="2003",
  volume="33",
  number="2-3",
  pages="9",
  issn="0078-5466"
}