Publication detail

Deposition and in-situ charakterization of ultra-thin films

VOBORNÝ, S. KOLÍBAL, M. MACH, J. ČECHAL, J. BÁBOR, P. PRŮŠA, S. SPOUSTA, J. ŠIKOLA, T.

Original Title

Deposition and in-situ charakterization of ultra-thin films

Type

journal article - other

Language

English

Original Abstract

Paper deals with the deposition and in-situ charakterization of ultra-thin films

Keywords

Ion beam, deposition, XPS

Authors

VOBORNÝ, S.; KOLÍBAL, M.; MACH, J.; ČECHAL, J.; BÁBOR, P.; PRŮŠA, S.; SPOUSTA, J.; ŠIKOLA, T.

RIV year

2004

Released

1. 1. 2004

ISBN

0040-6090

Periodical

Thin Solid Films

Year of study

459

Number

1-2

State

Kingdom of the Netherlands

Pages from

17

Pages to

21

Pages count

5

BibTex

@article{BUT42360,
  author="Stanislav {Voborný} and Miroslav {Kolíbal} and Jindřich {Mach} and Jan {Čechal} and Petr {Bábor} and Stanislav {Průša} and Jiří {Spousta} and Tomáš {Šikola}",
  title="Deposition and in-situ charakterization of ultra-thin films",
  journal="Thin Solid Films",
  year="2004",
  volume="459",
  number="1-2",
  pages="5",
  issn="0040-6090"
}