Publication detail

In situ analysis of PMPSi by spectroscopic ellipsometry and XPS

ČECHAL, J. TICHOPÁDEK, P. NEBOJSA, A. BONAVENTUROVÁ, O. URBÁNEK, M. SPOUSTA, J. NAVRÁTIL, K. ŠIKOLA, T.

Original Title

In situ analysis of PMPSi by spectroscopic ellipsometry and XPS

Type

journal article - other

Language

English

Original Abstract

Paper deals with an in situ analysis of PMPSi by spectroscopic ellipsometry and XPS

Key words in English

PMPSi, optical degradation. spectroscopic ellipsometry, XPS

Authors

ČECHAL, J.; TICHOPÁDEK, P.; NEBOJSA, A.; BONAVENTUROVÁ, O.; URBÁNEK, M.; SPOUSTA, J.; NAVRÁTIL, K.; ŠIKOLA, T.

RIV year

2004

Released

1. 1. 2004

ISBN

0142-2421

Periodical

Surface and Interface Analysis

Year of study

38

Number

8

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1218

Pages to

1221

Pages count

4

BibTex

@article{BUT42361,
  author="Jan {Čechal} and Petr {Tichopádek} and Alois {Nebojsa} and Olga {Bonaventurová} and Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Tomáš {Šikola}",
  title="In situ analysis of PMPSi by spectroscopic ellipsometry and XPS",
  journal="Surface and Interface Analysis",
  year="2004",
  volume="38",
  number="8",
  pages="4",
  issn="0142-2421"
}