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PŘIKRYL, R. ČECH, V. ZAJÍČKOVÁ, L. VANĚK, J. JONES, F. BEHZADI, S.
Original Title
Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane
Type
journal article - other
Language
English
Original Abstract
Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapour deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.
Keywords
Nanoindentation, Ellipsometry, PACVD, Plasma polymer
Authors
PŘIKRYL, R.; ČECH, V.; ZAJÍČKOVÁ, L.; VANĚK, J.; JONES, F.; BEHZADI, S.
RIV year
2005
Released
11. 3. 2005
Publisher
Elsevier
Location
Germany, GAPA
ISBN
0257-8972
Periodical
Surface and Coatings Technology
Year of study
Number
200
State
Swiss Confederation
Pages from
468
Pages to
471
Pages count
4
BibTex
@article{BUT45809, author="Radek {Přikryl} and Vladimír {Čech} and Lenka {Zajíčková} and Jan {Vaněk} and Frank {Jones} and Shasa {Behzadi}", title="Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane", journal="Surface and Coatings Technology", year="2005", volume="2005", number="200", pages="468--471", issn="0257-8972" }