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MISTRÍK, J. ČECHALOVÁ, B. STUDÝNKA, J. ČECH, V.
Original Title
Spectroscopic ellipsometry study of plasma-polymerised vinyltriethoxysilane films
Type
journal article - other
Language
English
Original Abstract
Plasma-polymerised vinyltriethoxysilane (pp-VTES) films with thicknesses ranging from 20 nm to about 5 micron were studied by combined method of spectroscopic ellipsometry and optical reflectivity in VIS and UV spectral zone. For these photon energies Tauc-Lorentz dielectric function (with a band gap of about 2.5 eV) was found to be an appropriate parameterisation of pp-VTES optical constants. Various sample models, accounting for the presence of film interfaces, film refractive index gradient profile and film thickness non uniformity were considered. Pp-VTES films (t < 1 m) can be considered as homogeneous films, whereas thick films show imperfections, which dominant character was assigned to film thickness non uniformity.
Keywords
thin film; plasma polymerization; ellipsometry
Authors
MISTRÍK, J.; ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.
RIV year
2009
Released
22. 12. 2009
ISBN
0957-4522
Periodical
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Year of study
20
Number
1
State
Kingdom of the Netherlands
Pages from
S451
Pages to
S455
Pages count
5