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ČECH, V. ČECHALOVÁ, B. TRIVEDI, R. STUDÝNKA, J.
Original Title
Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry
Type
journal article - other
Language
English
Original Abstract
Well-defined single layer and multilayered a-SiC:H films, deposited from tetravinylsilane at different powers by plasma-enhanced chemical vapor deposition on silicon, were intensively studied by in situ spectroscopic ellipsometry, nanoindentation, and atomic force microscopy. A realistic model of the sample structure was used to analyze ellipsometric data and distinguish individual layers in the multilayered film, evaluate their thickness and optical constants. Dispersion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 315 - 25 nm, and corresponded to those of the single layer. A beveled section of the multilayered film revealed the individual layers that were investigated by atomic force microscopy and nanoindentation to confirm that mechanical properties in multilayered and single layer films are similar.
Keywords
Multilayers; Plasma processing and deposition; Ellipsometry; Atomic force microscopy (AFM)
Authors
ČECH, V.; ČECHALOVÁ, B.; TRIVEDI, R.; STUDÝNKA, J.
RIV year
2009
Released
22. 12. 2009
ISBN
0040-6090
Periodical
Thin Solid Films
Year of study
517
Number
21
State
Kingdom of the Netherlands
Pages from
6034
Pages to
6037
Pages count
4
BibTex
@article{BUT47020, author="Vladimír {Čech} and Božena {Čechalová} and Rutul Rajendra {Trivedi} and Jan {Studýnka}", title="Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry", journal="Thin Solid Films", year="2009", volume="517", number="21", pages="6034--6037", issn="0040-6090" }