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COUFAL, O.; BARTLOVÁ, M.
Original Title
Influence of concentration on the values of recombination and ionization rate coefficients of atoms S and F
English Title
Type
Peer-reviewed article not indexed in WoS or Scopus
Original Abstract
The values or rate recombination and diffusion coefficients of S and F atoms and their ions were computed by means of modified diffusion approximation and incorporated into system of kinetic equations to model quenching process in SF6.
English abstract
Keywords
Reaction kinetics, recombination and ionization, SF6 plasma
Key words in English
Authors
Released
23.07.2004
ISBN
0011-4626
Periodical
Czechoslovak Journal of Physics
Volume
54
Number
Supplement C
State
Czech Republic
Pages from
C665
Pages to
C670
Pages count
6