Publication detail

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D. BURŠÍKOVÁ, V.

Original Title

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Type

journal article in Web of Science

Language

English

Original Abstract

Complete optical characterization of diamond-like carbon films non-uniform in thickness is performed usig spectroscopic imaging reflectometry. It is shown that by using this technique it is possible to determine the distributions of the refractive index, extinction coefficient and thickness (with arbitrary shape of the thickness non-uniformity) of these films.

Keywords

spectroscopic imaging reflectometry, diamond-like carbon films, optical analysis

Authors

OHLÍDAL, M.; OHLÍDAL, I.; KLAPETEK, P.; NEČAS, D.; BURŠÍKOVÁ, V.

RIV year

2009

Released

31. 1. 2009

Publisher

Elsevier

Location

LAUSANNE

ISBN

0925-9635

Periodical

Diamond and Related Materials

Year of study

2009 (18)

Number

1

State

Kingdom of the Netherlands

Pages from

384

Pages to

387

Pages count

4

BibTex

@article{BUT48065,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas} and Vilma {Buršíková}",
  title="Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films",
  journal="Diamond and Related Materials",
  year="2009",
  volume="2009 (18)",
  number="1",
  pages="384--387",
  issn="0925-9635"
}