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OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D. BURŠÍKOVÁ, V.
Original Title
Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films
Type
journal article in Web of Science
Language
English
Original Abstract
Complete optical characterization of diamond-like carbon films non-uniform in thickness is performed usig spectroscopic imaging reflectometry. It is shown that by using this technique it is possible to determine the distributions of the refractive index, extinction coefficient and thickness (with arbitrary shape of the thickness non-uniformity) of these films.
Keywords
spectroscopic imaging reflectometry, diamond-like carbon films, optical analysis
Authors
OHLÍDAL, M.; OHLÍDAL, I.; KLAPETEK, P.; NEČAS, D.; BURŠÍKOVÁ, V.
RIV year
2009
Released
31. 1. 2009
Publisher
Elsevier
Location
LAUSANNE
ISBN
0925-9635
Periodical
Diamond and Related Materials
Year of study
2009 (18)
Number
1
State
Kingdom of the Netherlands
Pages from
384
Pages to
387
Pages count
4
BibTex
@article{BUT48065, author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas} and Vilma {Buršíková}", title="Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films", journal="Diamond and Related Materials", year="2009", volume="2009 (18)", number="1", pages="384--387", issn="0925-9635" }