Publication detail

Detection of signal electrons at higher pressure in the specimen chamber

JIRÁK, J., AUTRATA, R., ŠPINKA, J.

Original Title

Detection of signal electrons at higher pressure in the specimen chamber

Type

conference paper

Language

English

Original Abstract

Scintillation and ionization detectors for the detection of signals at higher pressure in the specimen chamber of the scanning electron microscope. While the signal detected by the scintillation detector decreases with the growing pressure,for ionization detector the maximum of the signal amplification by the impact ionization in gaseous environment at a certain value of pressure is typical. This value can be influencedby the choice of the working conditions as well as the gaseous environment used.

Keywords

Scanning electron microscopy at higher pressure in the specimen chamber, detection of SEs, detection of BSEs, ionization detector, scintillation detector

Authors

JIRÁK, J., AUTRATA, R., ŠPINKA, J.

RIV year

2002

Released

8. 7. 2002

Publisher

Institute of Scientific Instruments,Academy of Sciences of the Czech Republic Czechoslovak Microscopy Society

Location

Brno

ISBN

80-238-8986-9

Book

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Edition number

1

Pages from

55

Pages to

56

Pages count

2

BibTex

@inproceedings{BUT4820,
  author="Josef {Jirák} and Rudolf {Autrata} and Jiří {Špinka}",
  title="Detection of signal electrons at higher pressure in the specimen chamber",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2002",
  number="1",
  pages="2",
  publisher="Institute of Scientific Instruments,Academy of Sciences of the Czech Republic
Czechoslovak Microscopy Society",
  address="Brno",
  isbn="80-238-8986-9"
}