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HÁZE, J. VRBA, R. PAVLÍK, M.
Original Title
A novel hybrid integrated system for capacitive pressure MEMS sensors
Type
journal article - other
Language
English
Original Abstract
The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is auxiliary part made from standard SMD devices. The C/I converter was designed in CMOS process with technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller, communication and data bus. The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the mentioned AD 7745 converter, but with less complexity of the whole circuitries.
Keywords
MEMS sensor, data acquisition system
Authors
HÁZE, J.; VRBA, R.; PAVLÍK, M.
RIV year
2009
Released
3. 12. 2009
Publisher
ZCU Plzen
Location
Plzen
ISBN
1802-4564
Periodical
ElectroScope - http://www.electroscope.zcu.cz
Year of study
Number
3
State
Czech Republic
Pages from
41
Pages to
44
Pages count
4
URL
https://dspace5.zcu.cz/bitstream/11025/548/1/haze.pdf
BibTex
@article{BUT48726, author="Jiří {Háze} and Radimír {Vrba} and Michal {Pavlík}", title="A novel hybrid integrated system for capacitive pressure MEMS sensors", journal="ElectroScope - http://www.electroscope.zcu.cz", year="2009", volume="2009", number="3", pages="41--44", issn="1802-4564", url="https://dspace5.zcu.cz/bitstream/11025/548/1/haze.pdf" }