Publication detail

Combined method of spectroscopic ellipsometry and photometry as an efficient tool for the optical characterisation of chalcogenide thin films

FRANTA, D. NEČAS, D. OHLÍDAL, I. HRDLIČKA, M. PAVLIŠTA, M. FRUMAR, M. OHLÍDAL, M.

Original Title

Combined method of spectroscopic ellipsometry and photometry as an efficient tool for the optical characterisation of chalcogenide thin films

Type

journal article in Web of Science

Language

English

Original Abstract

The optical characterisation of the As33Se67 and Ge2Sb2Te5 chalcogenide thin films is carried out using the combined method of VASE and SR. This method permits to determine both structural and dispersion parameters describing the thin films exhibiting various defects. The structural model is based on including roughness, overlayers and thickness non-uniformity. The dispersion models are based on parametrisation of the joint density of states. These models, unlike the classical models derived from the Lorentz oscillator model, can describe finite bands which allows to introduce a parameter proportional to the density of electrons. It is shown that this method enables to investigate quantitatively changes in the electronic structure of the materials caused by phase transitions which is demonstrated on the Ge2Sb2Te5. It is shown that the combined method with including true structural and dispersion models is a powerful tool for the optical characterisation of thin films exhibiting disordered structure.

Keywords

Ellipsometry; Photometry; Chalcogenige; Thin film

Authors

FRANTA, D.; NEČAS, D.; OHLÍDAL, I.; HRDLIČKA, M.; PAVLIŠTA, M.; FRUMAR, M.; OHLÍDAL, M.

RIV year

2009

Released

25. 12. 2009

Publisher

NATL INST OPTOELECTRONICS

Location

BUCHAREST-MAGURELE 76900, ROMANIA

ISBN

1454-4164

Periodical

Journal of Optoelectronics and Advanced Materials

Year of study

11

Number

12

State

Romania

Pages from

1891

Pages to

1898

Pages count

8

BibTex

@article{BUT49384,
  author="Daniel {Franta} and David {Nečas} and Ivan {Ohlídal} and Martin {Hrdlička} and Martin {Pavlišta} and Miloslav {Frumar} and Miloslav {Ohlídal}",
  title="Combined method of spectroscopic ellipsometry and photometry as an efficient tool for the optical characterisation of chalcogenide thin films",
  journal="Journal of Optoelectronics and Advanced Materials",
  year="2009",
  volume="11",
  number="12",
  pages="1891--1898",
  issn="1454-4164"
}