Publication detail

Dispersion and detection of signal electrons in environmental SEM

NEDĚLA, V.

Original Title

Dispersion and detection of signal electrons in environmental SEM

Type

conference paper

Language

English

Original Abstract

The environmental scannig microscope id based on convenient adaptation of classical SEM employing the focused primary electron beam.

Keywords

Dispersion, Detection, Signal, Environmental

Authors

NEDĚLA, V.

RIV year

2002

Released

1. 1. 2002

Location

Brno 2002

ISBN

80-238-8986-9

Book

Recent Trends

Pages from

65

Pages to

66

Pages count

2

BibTex

@inproceedings{BUT4975,
  author="Vilém {Neděla}",
  title="Dispersion and detection of signal electrons in environmental SEM",
  booktitle="Recent Trends",
  year="2002",
  pages="2",
  address="Brno 2002",
  isbn="80-238-8986-9"
}