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Publication detail
HRNČIŘÍK, P.
Original Title
Computer controlled SEM Tesla BS 350 with a Schottky cathode for detection of slow and Auger electrons
Type
conference paper
Language
English
Original Abstract
The goal of the experiment is an in-situ comparison of the signals given by Auger and by slow electrons (down to 10eV) with a high resolution. These open new possibilities of getting information about the material and topgraphical contrast from real surfaces. A new experimental device was designed for this intention, which is presented in this contribution.
Key words in English
Auger electrons, Slow electrons, computer controlled SEM
Authors
Released
12. 4. 2002
Publisher
Czechoslovak Microscopy Society
Location
Brno
ISBN
80-238-8749-1
Book
Microscopy 2002 - Proceedings of the 2nd Annual Meeting of the Czechoslovak Microscopy Society
Pages from
71
Pages to
72
Pages count
2
BibTex
@inproceedings{BUT5367, author="Petr {Hrnčiřík}", title="Computer controlled SEM Tesla BS 350 with a Schottky cathode for detection of slow and Auger electrons", booktitle="Microscopy 2002 - Proceedings of the 2nd Annual Meeting of the Czechoslovak Microscopy Society", year="2002", pages="2", publisher="Czechoslovak Microscopy Society", address="Brno", isbn="80-238-8749-1" }