Publication detail

Computer controlled SEM Tesla BS 350 with a Schottky cathode for detection of slow and Auger electrons

HRNČIŘÍK, P.

Original Title

Computer controlled SEM Tesla BS 350 with a Schottky cathode for detection of slow and Auger electrons

Type

conference paper

Language

English

Original Abstract

The goal of the experiment is an in-situ comparison of the signals given by Auger and by slow electrons (down to 10eV) with a high resolution. These open new possibilities of getting information about the material and topgraphical contrast from real surfaces. A new experimental device was designed for this intention, which is presented in this contribution.

Key words in English

Auger electrons, Slow electrons, computer controlled SEM

Authors

HRNČIŘÍK, P.

Released

12. 4. 2002

Publisher

Czechoslovak Microscopy Society

Location

Brno

ISBN

80-238-8749-1

Book

Microscopy 2002 - Proceedings of the 2nd Annual Meeting of the Czechoslovak Microscopy Society

Pages from

71

Pages to

72

Pages count

2

BibTex

@inproceedings{BUT5367,
  author="Petr {Hrnčiřík}",
  title="Computer controlled SEM Tesla BS 350 with a Schottky cathode for detection of slow and Auger electrons",
  booktitle="Microscopy 2002 - Proceedings of the 2nd Annual Meeting of the Czechoslovak Microscopy Society",
  year="2002",
  pages="2",
  publisher="Czechoslovak Microscopy Society",
  address="Brno",
  isbn="80-238-8749-1"
}