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Publication detail
HUBÁLEK, J.
Original Title
Nanowires Electroforming of Nanoporous Electrodes
Type
abstract
Language
English
Original Abstract
The rapidly growing microelectronics industry has placed an increasing emphasis on the development of cost-effective and environmentally thin film processing technologies. These technologies include electroplating (electrodeposition) and etching of thin films by dry and wet processing. Last ten years the nanotechnologies are in a centre of scientific interest. These new techniques bring new nanostructured materials for utilization in microelectronics processes. Anodization of aluminum under specific condition enables to create ordered nanoporous structure in growing alumina. Nanopores are distributed with regular ordering in honeycomb-like cells. The nanoporous thin film can be used as template for metal nanowires electrodeposition.
Key words in English
nanowires, nanotubes, electroplating
Authors
Released
2. 2. 2005
Location
Tarragona, Španělsko
Pages from
66
Pages to
Pages count
1
BibTex
@misc{BUT60244, author="Jaromír {Hubálek}", title="Nanowires Electroforming of Nanoporous Electrodes", booktitle="5a Conferencia de Dispositivos Electrónicos, Libro de Abstracts", year="2005", pages="1", address="Tarragona, Španělsko", note="abstract" }