Přístupnostní navigace
E-application
Search Search Close
Publication detail
VOBORNÝ, S., ŠIKOLA, T., PRŮŠA, S., ZLÁMAL, J., BÁBOR, P.
Original Title
Diagnostics and optimization of ion source parameters
Type
conference paper
Language
English
Original Abstract
This contribution deals with diagnostics and consequent optimization of plasmatic ion source. Ion-beam current density and ion current loss measurements are determined with the attempt of improving ion-beam transportation characteristics.
Key words in English
ion source, optimization, thin film deposition
Authors
RIV year
2002
Released
15. 11. 2001
Publisher
FEI VUT v Brně
Location
Brno
ISBN
80-214-1992-X
Book
Sborník příspěvků konference Nové trendy ve fyzice
Pages from
304
Pages to
309
Pages count
6
BibTex
@{BUT69632 }