Publication detail

A method of photoresists sensitivity measurement

DUFKOVÁ, P., VESELÝ, M.

Original Title

A method of photoresists sensitivity measurement

Type

conference paper

Language

English

Original Abstract

poster

Keywords

photoresist; sensitivity

Authors

DUFKOVÁ, P., VESELÝ, M.

Released

9. 9. 1999

Location

Fakulta chemická VUT v Brně

ISBN

80-214-1371-9

Book

1st Meeting on Chemistry&Life, Book of Abstracts

Edition number

1

Pages from

196

Pages to

196

Pages count

1

BibTex

@{BUT109716
}