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MIKEL, B., ČÍP, O., HARNA, Z.
Original Title
Two axis micropositioning system with piezoelectric actuators and digital control
Type
conference paper
Language
English
Original Abstract
The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.
Keywords
Micropositioning, PID controller, interferometry measurements.
Authors
Released
1. 1. 2001
Publisher
SPIE
Location
USA
ISBN
0-8194-4047-7
Book
12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Edition number
1
Pages from
333
Pages to
338
Pages count
6
BibTex
@{BUT69725 }