Publication detail

Two axis micropositioning system with piezoelectric actuators and digital control

MIKEL, B., ČÍP, O., HARNA, Z.

Original Title

Two axis micropositioning system with piezoelectric actuators and digital control

Type

conference paper

Language

English

Original Abstract

The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.

Keywords

Micropositioning, PID controller, interferometry measurements.

Authors

MIKEL, B., ČÍP, O., HARNA, Z.

Released

1. 1. 2001

Publisher

SPIE

Location

USA

ISBN

0-8194-4047-7

Book

12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics

Edition number

1

Pages from

333

Pages to

338

Pages count

6

BibTex

@{BUT69725
}