Publication detail
Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM
NEDĚLA, V. KONVALINA, I. LENCOVÁ, B. ZLÁMAL, J.
Original Title
Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM
Type
journal article - other
Language
English
Original Abstract
This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.
Keywords
Electron-gas interactions; Monte Carlo simulations; Signal amplification; Analytical models
Authors
NEDĚLA, V.; KONVALINA, I.; LENCOVÁ, B.; ZLÁMAL, J.
RIV year
2011
Released
21. 7. 2011
ISBN
0168-9002
Periodical
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
Year of study
645
Number
1
State
Kingdom of the Netherlands
Pages from
79
Pages to
83
Pages count
5
BibTex
@article{BUT72697,
author="Vilém {Neděla} and Ivo {Konvalina} and Bohumila {Lencová} and Jakub {Zlámal}",
title="Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM",
journal="NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT",
year="2011",
volume="645",
number="1",
pages="79--83",
issn="0168-9002"
}