Publication detail

Mechanical properties of Al thin film measured by two different methods

KUBĚNA, I. KRUML, T.

Original Title

Mechanical properties of Al thin film measured by two different methods

Type

journal article - other

Language

English

Original Abstract

Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 mm and their diameter about 1,3 mm. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated.

Keywords

thin films, focused ion beam, aluminium, nanoindentation

Authors

KUBĚNA, I.; KRUML, T.

RIV year

2011

Released

1. 11. 2011

ISBN

1335-1532

Periodical

Acta Metallurgica Slovaca

Year of study

17

Number

3

State

Slovak Republic

Pages from

163

Pages to

168

Pages count

6

BibTex

@article{BUT75370,
  author="Ivo {Kuběna} and Tomáš {Kruml}",
  title="Mechanical properties of Al thin film measured by two different methods",
  journal="Acta Metallurgica Slovaca",
  year="2011",
  volume="17",
  number="3",
  pages="163--168",
  issn="1335-1532"
}