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KUBĚNA, I. KRUML, T.
Original Title
Mechanical properties of Al thin film measured by two different methods
Type
journal article - other
Language
English
Original Abstract
Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 mm and their diameter about 1,3 mm. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated.
Keywords
thin films, focused ion beam, aluminium, nanoindentation
Authors
KUBĚNA, I.; KRUML, T.
RIV year
2011
Released
1. 11. 2011
ISBN
1335-1532
Periodical
Acta Metallurgica Slovaca
Year of study
17
Number
3
State
Slovak Republic
Pages from
163
Pages to
168
Pages count
6
BibTex
@article{BUT75370, author="Ivo {Kuběna} and Tomáš {Kruml}", title="Mechanical properties of Al thin film measured by two different methods", journal="Acta Metallurgica Slovaca", year="2011", volume="17", number="3", pages="163--168", issn="1335-1532" }