Publication detail

Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces

LÉTAL, P., TOMÁNEK, P., GRMELA, L.

Original Title

Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces

Type

conference paper

Language

English

Original Abstract

Near-field optical spectroscopy is an excellent tool to the nondesctructive inspection of the semiconductor interfaces. Its supperresolution is much better than that of the classical optical microscope.

Keywords

near-field optics, local spectroscopy, semiconductor, interface

Authors

LÉTAL, P., TOMÁNEK, P., GRMELA, L.

RIV year

2003

Released

19. 10. 2000

Location

Trnava

ISBN

80-227-1413-5

Book

8th CO-MAT-TECH 2000

Pages from

141

Pages to

146

Pages count

6

BibTex

@inproceedings{BUT7997,
  author="Petr {Létal} and Pavel {Tománek} and Lubomír {Grmela}",
  title="Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces",
  booktitle="8th CO-MAT-TECH 2000",
  year="2000",
  pages="6",
  address="Trnava",
  isbn="80-227-1413-5"
}