Publication detail

Drop-Coating Deposition Procedure In Micro-Hotplate Gas Sensor Fabrication

SOTTER, E., PRÁŠEK, J., KUCHTA, R.

Original Title

Drop-Coating Deposition Procedure In Micro-Hotplate Gas Sensor Fabrication

Type

conference paper

Language

English

Original Abstract

In this paper we report on deposition of a drop-coated film to fabricate a micromachined gas sensor using microhotplates. We also show the characteristics of drops resulting for the deposition process and the responses of the fabricated sensor to NH3.

Key words in English

thick film, sensor, gas

Authors

SOTTER, E., PRÁŠEK, J., KUCHTA, R.

Released

15. 10. 2003

Location

Západočeská universita v Plzni

ISBN

80-7082-983-4

Book

Elektrotechnika a informatika 2003

Pages count

4

BibTex

@inproceedings{BUT8020,
  author="Jan {Prášek} and Radek {Kuchta}",
  title="Drop-Coating Deposition Procedure In Micro-Hotplate Gas Sensor Fabrication",
  booktitle="Elektrotechnika a informatika 2003",
  year="2003",
  pages="4",
  address="Západočeská universita v Plzni",
  isbn="80-7082-983-4"
}