Publication detail

Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors

IVANOV, P., LLOBET, E., VILANOVA, X., BREZMES, J., CORREIG, X., HUBÁLEK, J., MALYSZ, K., GRACIA, I., CANÉ, C.

Original Title

Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors

Type

conference paper

Language

English

Original Abstract

We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing was made before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and discussed.

Keywords

gas sensors, micro-hotplate, thick-film, thin-film

Authors

IVANOV, P., LLOBET, E., VILANOVA, X., BREZMES, J., CORREIG, X., HUBÁLEK, J., MALYSZ, K., GRACIA, I., CANÉ, C.

Released

12. 2. 2003

Publisher

Instituto de Microelectrónika de Barcelona CNM-CSIC

Location

Calella de la Costa, Barcelona, Spain

ISBN

84-607-6771-X

Book

4th Conference on Electronic Devices

Pages from

145

Pages to

145

Pages count

1

BibTex

@inproceedings{BUT8030,
  author="Peter {Ivanov} and Eduard {Llobet} and Xavier {Vilanova} and Jesús {Brezmes} and Xavier {Correig} and Jaromír {Hubálek} and Karel {Malysz} and I. {Gracia} and Carlas {Cané}",
  title="Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors",
  booktitle="4th Conference on Electronic Devices",
  year="2003",
  pages="1",
  publisher="Instituto de Microelectrónika de Barcelona CNM-CSIC",
  address="Calella de la Costa, Barcelona, Spain",
  isbn="84-607-6771-X"
}