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IVANOV, P., HUBÁLEK, J., MALYSZ, K.
Original Title
Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds
Type
conference paper
Language
English
Original Abstract
The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing technique, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX.
Keywords
micro hot plate, sceenprinting, sputtering, SEM, XRD, EDX, ammonia sensor
Authors
Released
1. 1. 2003
Location
Povoa de Varzim, Portugalsko
ISBN
0-9733840-0
Book
Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute
Pages from
291
Pages to
Pages count
1
BibTex
@inproceedings{BUT8395, author="Peter {Ivanov} and Jaromír {Hubálek} and Karel {Malysz}", title="Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds", booktitle="Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute", year="2003", pages="1", address="Povoa de Varzim, Portugalsko", isbn="0-9733840-0" }