Publication detail

Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

IVANOV, P., HUBÁLEK, J., MALYSZ, K.

Original Title

Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

Type

conference paper

Language

English

Original Abstract

The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing technique, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX.

Keywords

micro hot plate, sceenprinting, sputtering, SEM, XRD, EDX, ammonia sensor

Authors

IVANOV, P., HUBÁLEK, J., MALYSZ, K.

Released

1. 1. 2003

Location

Povoa de Varzim, Portugalsko

ISBN

0-9733840-0

Book

Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute

Pages from

291

Pages to

291

Pages count

1

BibTex

@inproceedings{BUT8395,
  author="Peter {Ivanov} and Jaromír {Hubálek} and Karel {Malysz}",
  title="Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds",
  booktitle="Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute",
  year="2003",
  pages="1",
  address="Povoa de Varzim, Portugalsko",
  isbn="0-9733840-0"
}