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BILALOV, B. KARDASHOVA, G. ABDURAZAKOV, A. SOBOLA, D. ARKHIPOV, A.
Original Title
Peculiarities of the obtaining process of silicon carbide and aluminum nitride
English Title
Type
conference paper
Language
Russian
Original Abstract
Obtaining of solid solutions of SiC-AlN system with predictable composition and with expected physical-chemical properties is only possible on the basis of whole and detail investigation of interaction character between components of solid solution and by study of connection between composition and properties. The objects of this study are samples of thin films of aluminum nitride and its solid solutions formatted on silicon carbide substrates by sublimation of source of polycrystalline (SiC)1-x(AlN)x solid solution (x = 0.25 and x=1) at 2100-2300 K in nitrogen atmosphere and at atmosphere pressure.
English abstract
Keywords
sublimation, solid solution, thin layer, source, target
Key words in English
sublimation, solid solution, thin layer, target
Authors
BILALOV, B.; KARDASHOVA, G.; ABDURAZAKOV, A.; SOBOLA, D.; ARKHIPOV, A.
RIV year
2011
Released
4. 5. 2011
Publisher
Southwest state university
Location
Kursk
ISBN
978-5-7681-0642-3
Book
Proceedings of Internationalscientific conference: Advanced technologies, equipment and analytical systems for material sciences and nanomaterials
Edition
K.V.Kozitov
Edition number
4.05.2011
Pages from
829
Pages to
831
Pages count
3
BibTex
@inproceedings{BUT89667, author="Bilal {Bilalov} and Gulnara {Kardashova} and Abdula {Abdurazakov} and Dinara {Sobola} and Alexandr {Arkhipov}", title="Peculiarities of the obtaining process of silicon carbide and aluminum nitride", booktitle="Proceedings of Internationalscientific conference: Advanced technologies, equipment and analytical systems for material sciences and nanomaterials", year="2011", series="K.V.Kozitov", number="4.05.2011", pages="829--831", publisher="Southwest state university", address="Kursk", isbn="978-5-7681-0642-3" }