Publication detail

Accumulator Mass Structure Observation in ESEM

HAMAN, M., JIRÁK, J., ŠPINKA, J.

Original Title

Accumulator Mass Structure Observation in ESEM

Type

conference paper

Language

English

Original Abstract

The work deals with problems of accumulator mass structure observation by means of scintillation and ionization detector in Environmental Scanning Electron Microscope (ESEM). There are presented graphs of contrast dependence on pressure and distance of a sample from the detector. There is indicated dependence of signal on operating conditions of the microscope from both types of detectors.

Key words in English

ESEM, accumulator mass structure, detection BSE and SE

Authors

HAMAN, M., JIRÁK, J., ŠPINKA, J.

RIV year

2003

Released

9. 9. 2003

Publisher

Ing, Zdeněk Novotný, CSc. Brno

Location

Brno, Czech Republic

ISBN

80-214-2452-4

Book

Electronic devices and Systems EDS 03

Pages from

445

Pages to

448

Pages count

4

URL

VUT Brno

BibTex

@inproceedings{BUT8975,
  author="Miroslav {Haman} and Josef {Jirák} and Jiří {Špinka}",
  title="Accumulator Mass Structure Observation in ESEM",
  booktitle="Electronic devices and Systems EDS 03",
  year="2003",
  pages="4",
  publisher="Ing, Zdeněk Novotný, CSc. Brno",
  address="Brno, Czech Republic",
  isbn="80-214-2452-4",
  url="VUT Brno"
}