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SVATOŠ, V. MÁRIK, M. PEKÁREK, J. HRDÝ, R. CHOMOUCKÁ, J. HUBÁLEK, J.
Original Title
Low power MEMS heating membrane
Type
conference paper
Language
English
Original Abstract
This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate.
Keywords
MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining.
Authors
SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; HRDÝ, R.; CHOMOUCKÁ, J.; HUBÁLEK, J.
RIV year
2012
Released
28. 6. 2012
Publisher
Vysoké učení technické v Brně
Location
Brno
ISBN
978-80-214-4539-0
Book
EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS
Edition number
1
Pages from
257
Pages to
260
Pages count
4
BibTex
@inproceedings{BUT93610, author="Vojtěch {Svatoš} and Marian {Márik} and Jan {Pekárek} and Radim {Hrdý} and Jana {Pekárková} and Jaromír {Hubálek}", title="Low power MEMS heating membrane", booktitle="EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS", year="2012", number="1", pages="257--260", publisher="Vysoké učení technické v Brně", address="Brno", isbn="978-80-214-4539-0" }