Power supply sensitivity of MEMS gyroscopes

conference paper

English

Little is known about a sensitivity of MEMS gyroscopes to a power supply fluctuation and how to measure these effects. This information can be helpful to improve a performance of sensors, which is crucial especially for an inertial navigation. The paper is focused on the zero rate drift and the behavior of a build-in temperature sensor. These properties are analyzed for MEMS gyroscopes of various brands with different output configurations. The method of our measurement and underlying problems are described. Finally, results of the experiment are discussed and suitable models are suggested.

MEMS, gyroscope, zero rate supply drift, temperature sensor supply drift, power supply voltage, self-heating

VÁGNER, M.; BENEŠ, P.

2012

9. 9. 2012

Korea

978-89-950000-5-2

Proceedings of XX IMEKO World Congress

923-1

923-4

4