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KOLÍBAL, M. KONEČNÝ, M. LIGMAJER, F. ŠKODA, D. VYSTAVĚL, T. ZLÁMAL, J. VARGA, P. ŠIKOLA, T.
Original Title
Guided Assembly of Gold Colloidal Nanoparticles on Silicon Substrates Prepatterned by Charged Particle Beams
Type
journal article in Web of Science
Language
English
Original Abstract
Colloidal gold nanoparticles represent technological building blocks which are easy to fabricate while keeping full control of their shape and dimensions. Here, we report on a simple two-step maskless process to assemble gold nanoparticles from a water colloidal solution at specific sites of a silicon surface. First, the silicon substrate covered by native oxide is exposed to a charged particle beam (ions or electrons) and then immersed in a HF-modified solution of colloidal nanoparticles. The irradiation of the native oxide layer by a low-fluence charged particle beam causes changes in the type of surface-terminating groups, while the large fluences induce even more profound modification of surface composition. Hence, by a proper selection of the initial substrate termination, solution pH, and beam fluence, either positive or negative deposition of the colloidal nanoparticles can be achieved
Keywords
nanoparticle adhesion; nanofabrication; dual beam, FIB; silicon; gold; self-assembly; selective growth; guided growth; surface potential
Authors
KOLÍBAL, M.; KONEČNÝ, M.; LIGMAJER, F.; ŠKODA, D.; VYSTAVĚL, T.; ZLÁMAL, J.; VARGA, P.; ŠIKOLA, T.
RIV year
2012
Released
25. 10. 2012
ISBN
1936-0851
Periodical
ACS Nano
Year of study
6
Number
11
State
United States of America
Pages from
10098
Pages to
10106
Pages count
9
BibTex
@article{BUT96403, author="Miroslav {Kolíbal} and Martin {Konečný} and Filip {Ligmajer} and David {Škoda} and Tomáš {Vystavěl} and Jakub {Zlámal} and Peter {Varga} and Tomáš {Šikola}", title="Guided Assembly of Gold Colloidal Nanoparticles on Silicon Substrates Prepatterned by Charged Particle Beams", journal="ACS Nano", year="2012", volume="6", number="11", pages="10098--10106", issn="1936-0851" }