Publication detail

The Growth and Gas Sensing Properties of Mixed Oxide Nanocomposite Thin Film Derived from Anodically Oxidized Al/Ti Metal Layers

VAZQUEZ, R. CALAVIA, R. LLOBET, E. GISPERT-GUIRADO, F. HUBALEK, J. MOZALEV, A.

Original Title

The Growth and Gas Sensing Properties of Mixed Oxide Nanocomposite Thin Film Derived from Anodically Oxidized Al/Ti Metal Layers

Type

journal article - other

Language

English

Original Abstract

A method is described for forming nanostructured thin solid films consisting of regularly mixed titanium-aluminium oxide nanocomposites, with the self-organized root-like inner and column-like outer structures, derived from anodically oxidized Al/Ti bilayers sputter-deposited onto oxidized silicon wafers. The morphology, crystal structure and phase composition of the anodic films can be controlled and tailored during the film growth. The films are promising as fast-response NO2 sensing layers, the response and recovery times being as short as about 1 min.

Keywords

titanium-aluminium mixed oxide; nanocomposite film; anodizing; NO2 sensor

Authors

VAZQUEZ, R.; CALAVIA, R.; LLOBET, E.; GISPERT-GUIRADO, F.; HUBALEK, J.; MOZALEV, A.

RIV year

2012

Released

10. 10. 2012

Publisher

ELSEVIER SCIENCE BV

Location

SARA BURGERHARTSTRAAT 25, PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS

ISBN

1877-7058

Periodical

Procedia Engineering

Year of study

47

Number

1

State

Kingdom of the Netherlands

Pages from

833

Pages to

836

Pages count

4

BibTex

@article{BUT96771,
  author="Rosa Maria {Vazquez} and Raul {Calavia} and Eduard {Llobet} and Francesc {Gispert-Guirado} and Jaromír {Hubálek} and Alexander {Mozalev}",
  title="The Growth and Gas Sensing Properties of Mixed Oxide Nanocomposite Thin Film Derived from Anodically Oxidized Al/Ti Metal Layers",
  journal="Procedia Engineering",
  year="2012",
  volume="47",
  number="1",
  pages="833--836",
  issn="1877-7058"
}