Publication detail

One-dimensional autocorrelation and power spectrum density functions of irregularregions

NEČAS, D. KLAPETEK, P.

Original Title

One-dimensional autocorrelation and power spectrum density functions of irregularregions

Type

journal article in Web of Science

Language

English

Original Abstract

Scanning probe microscopy (SPM) can be effectively used for evaluation of nanoscale roughness of surfaces obtained by different technological processes. Spectral properties of surface roughness can be evaluated using algorithms based on Fast Fourier Transform (FFT). For data that are not rectangular, this approach, howeverfails. In this paper we describe a modification of SPM data evaluation algorithms enabling to use FFT based approach even for irregular and non-continuous data This opens novel possibilities in analysis of local surface roughness in many fields,e.g. on nanoparticles, semiconductor structures or any other nanostructured samples prepared using nanotechnology methods. Together with theoretical description of proposed method we present benchmarks for its performance and typical results of its application on different samples.

Keywords

Scanning probemicroscopy, Atomic forcemicroscopy, Roughness, Frequency analysis

Authors

NEČAS, D.; KLAPETEK, P.

RIV year

2013

Released

1. 1. 2013

ISBN

0304-3991

Periodical

Ultramicroscopy

Year of study

124

Number

1

State

Kingdom of the Netherlands

Pages from

13

Pages to

19

Pages count

7

BibTex

@article{BUT97280,
  author="David {Nečas} and Petr {Klapetek}",
  title="One-dimensional autocorrelation and power spectrum density functions of irregularregions",
  journal="Ultramicroscopy",
  year="2013",
  volume="124",
  number="1",
  pages="13--19",
  doi="10.1016/j.ultramic.2012.08.002",
  issn="0304-3991"
}