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NEČAS, D. KLAPETEK, P.
Original Title
One-dimensional autocorrelation and power spectrum density functions of irregularregions
Type
journal article in Web of Science
Language
English
Original Abstract
Scanning probe microscopy (SPM) can be effectively used for evaluation of nanoscale roughness of surfaces obtained by different technological processes. Spectral properties of surface roughness can be evaluated using algorithms based on Fast Fourier Transform (FFT). For data that are not rectangular, this approach, howeverfails. In this paper we describe a modification of SPM data evaluation algorithms enabling to use FFT based approach even for irregular and non-continuous data This opens novel possibilities in analysis of local surface roughness in many fields,e.g. on nanoparticles, semiconductor structures or any other nanostructured samples prepared using nanotechnology methods. Together with theoretical description of proposed method we present benchmarks for its performance and typical results of its application on different samples.
Keywords
Scanning probemicroscopy, Atomic forcemicroscopy, Roughness, Frequency analysis
Authors
NEČAS, D.; KLAPETEK, P.
RIV year
2013
Released
1. 1. 2013
ISBN
0304-3991
Periodical
Ultramicroscopy
Year of study
124
Number
1
State
Kingdom of the Netherlands
Pages from
13
Pages to
19
Pages count
7
BibTex
@article{BUT97280, author="David {Nečas} and Petr {Klapetek}", title="One-dimensional autocorrelation and power spectrum density functions of irregularregions", journal="Ultramicroscopy", year="2013", volume="124", number="1", pages="13--19", doi="10.1016/j.ultramic.2012.08.002", issn="0304-3991" }