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VYROUBAL, P. MAXA, J.
Original Title
The Aperture with Laval Nozzle in Secondary Electron Detector for Environmental Scanning Electron Microscopy
Type
book chapter
Language
English
Original Abstract
Electron microscopes belong between the most versatile devices. They are used not only for material research as well as to providing comprehensive information on the microstructure, crystallography, chemical composition and other properties of the sample. The evaluation of pressure on the secondary electrons trajectory is one of the important parameter by design of scintillation detector of secondary electrons. The final process is influenced by the size and the shape of the apertures used to separate areas with different pressure gradient. The comparison of the aperture with circular hole and aperture with Laval nozzle is the aim of this article.
Keywords
Aperture, Laval nozzle, circular hole, Environmental scanning electron microscope, scintillation detector, trajectory of secondary electrons, Mach number, pressure.
Authors
VYROUBAL, P.; MAXA, J.
RIV year
2013
Released
1. 2. 2013
Publisher
Silhavy sro (Scientfic Press)
Location
Vsetín 2012
ISBN
978-80-904741-2-3
Book
Computer Software and Hardware Applications
Edition
1
Edition number
Pages from
87
Pages to
95
Pages count
9
BibTex
@inbook{BUT97695, author="Petr {Vyroubal} and Jiří {Maxa}", title="The Aperture with Laval Nozzle in Secondary Electron Detector for Environmental Scanning Electron Microscopy", booktitle="Computer Software and Hardware Applications", year="2013", publisher="Silhavy sro (Scientfic Press)", address="Vsetín 2012", series="1", edition="1", pages="87--95", isbn="978-80-904741-2-3" }