Publication detail

Adaptation of Scanning Electron Microscope to Environmental Scanning Electron Microscope

NEDĚLA, V.

Original Title

Adaptation of Scanning Electron Microscope to Environmental Scanning Electron Microscope

Type

conference paper

Language

English

Original Abstract

This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.

Keywords

adaptation,scanning electron microscope, environmental scanning electron microscope,

Authors

NEDĚLA, V.

Released

1. 1. 2003

Location

Brno

ISBN

80-214-2379-X

Book

Proceedings of 9th conference and competition STUDENT EEICT 2003

Edition number

3

Pages from

495

Pages to

499

Pages count

5

URL

UETE FEKT VUT BRNO

BibTex

@inproceedings{BUT10724,
  author="Vilém {Neděla}",
  title="Adaptation of Scanning Electron Microscope to Environmental Scanning Electron Microscope",
  booktitle="Proceedings of 9th conference and competition STUDENT EEICT 2003",
  year="2003",
  number="3",
  pages="5",
  address="Brno",
  isbn="80-214-2379-X",
  url="UETE FEKT VUT BRNO"
}