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HRNČIŘÍK, P., MULLEROVÁ, I.
Original Title
Very Low Energy Scanning Electron Microscopy
Type
conference paper
Language
English
Original Abstract
The inelastic and elastic mean free paths (IMFP and EMFP) determine the largest sample thickness usable for transmission electron microscopy (TEM). At primary electron energies normally used for TEM (>50 keV), both mean free paths decrease as the primary energy is lowered. If the primary energy is lowered to below about 100 eV, IMFP is predicted to stop decreasing and to begin growing again [1, 2]. This opens up the exciting possibility of very low voltage TEM of sufficiently thin samples, with poorer resolution but greatly reduced radiation damage compared to conventional TEM.
Key words in English
SLETEM, SLEEM, SEM
Authors
Released
1. 1. 2004
Publisher
Ústav přístrojové techniky AV ČR
Location
Brno
ISBN
80-239-3246-2
Book
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
Pages from
33
Pages to
34
Pages count
2
BibTex
@inproceedings{BUT11285, author="Petr {Hrnčiřík} and Ilona {Müllerová}", title="Very Low Energy Scanning Electron Microscopy", booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation", year="2004", pages="2", publisher="Ústav přístrojové techniky AV ČR", address="Brno", isbn="80-239-3246-2" }