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SVATOŠ, V. PEKÁREK, J. DUŠEK, D. ŽÁK, J. HADAŠ, Z. PRÁŠEK, J.
Original Title
Design and Fabrication of Fully Implantable MEMS Cochlea
Type
conference paper
Language
English
Original Abstract
The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanical properties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The sound is detected by thin SiXNY diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed.
Keywords
Cochlear implant; MEMS; proceeding electronics; fabrication; simulation; diaphragm
Authors
SVATOŠ, V.; PEKÁREK, J.; DUŠEK, D.; ŽÁK, J.; HADAŠ, Z.; PRÁŠEK, J.
RIV year
2015
Released
2. 1. 2015
Publisher
Elsevier
Location
Vienna
ISBN
978-3-901509-99-5
Book
Proceeedings of DAAAM International Symposium on Intelligent Manufacturing and Automation 2014
1876-6102
Periodical
Energy Procedia
Year of study
100
Number
1
State
Kingdom of Thailand
Pages from
1224
Pages to
1231
Pages count
8
URL
https://www.sciencedirect.com/science/article/pii/S1877705815005147
Full text in the Digital Library
http://hdl.handle.net/11012/194754
BibTex
@inproceedings{BUT114544, author="Vojtěch {Svatoš} and Jan {Pekárek} and Daniel {Dušek} and Jaromír {Žák} and Zdeněk {Hadaš} and Jan {Prášek}", title="Design and Fabrication of Fully Implantable MEMS Cochlea", booktitle="Proceeedings of DAAAM International Symposium on Intelligent Manufacturing and Automation 2014", year="2015", journal="Energy Procedia", volume="100", number="1", pages="1224--1231", publisher="Elsevier", address="Vienna", doi="10.1016/j.proeng.2015.01.487", isbn="978-3-901509-99-5", issn="1876-6102", url="https://www.sciencedirect.com/science/article/pii/S1877705815005147" }