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BALRAM, KC WESTLY,DA DAVANCO,M GRUTTER,KE LI,Q MICHELS,T RAY,CH YU,LY KASICA,RJ WALLIN,CB GILBERT,IJ BRYCE,BA SIMELGOR,G TOPOLANCIK,J LOBONTIU,N LIU,YX NEUZIL,P SVATOS,V DILL,KA BERTRAND,NA METZLER,MG LOPEZ,G CZAPLEWSKI,DA OCOLA,L SRINIVASAN,KA STAVIS,SM AKSYUK,VA LIDDLE, JA KRYLOV,S ILIC, BR.
Original Title
The Nanolithography Toolbox
Type
journal article in Web of Science
Language
English
Original Abstract
This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro-and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices.
Keywords
CAD; lithography; nanofabrication; nanofluidic; nanophotonic; nanoplasmonic; nanoscale curved features; nanoscale design; nanoscale devices
Authors
BALRAM, KC; WESTLY,DA; DAVANCO,M; GRUTTER,KE; LI,Q; MICHELS,T; RAY,CH; YU,LY; KASICA,RJ; WALLIN,CB; GILBERT,IJ; BRYCE,BA; SIMELGOR,G; TOPOLANCIK,J; LOBONTIU,N; LIU,YX; NEUZIL,P; SVATOS,V; DILL,KA; BERTRAND,NA; METZLER,MG; LOPEZ,G; CZAPLEWSKI,DA; OCOLA,L; SRINIVASAN,KA; STAVIS,SM; AKSYUK,VA; LIDDLE, JA; KRYLOV,S; ILIC, BR.
Released
19. 10. 2016
Publisher
US GOVERNMENT PRINTING OFFICE
Location
WASHINGTON, DC 20402-9325 USA
ISBN
1044-677X
Periodical
JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Year of study
121
Number
1
State
United States of America
Pages from
464
Pages to
475
Pages count
11
URL
https://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=4&SID=W2hKFfHmgNk3xhiPDY1&page=1&doc=1
BibTex
@article{BUT130237, author="BALRAM, KC and WESTLY,DA and DAVANCO,M and GRUTTER,KE and LI,Q and MICHELS,T and RAY,CH and YU,LY and KASICA,RJ and WALLIN,CB and GILBERT,IJ and BRYCE,BA and SIMELGOR,G and TOPOLANCIK,J and LOBONTIU,N and LIU,YX and NEUZIL,P and SVATOS,V and DILL,KA and BERTRAND,NA and METZLER,MG and LOPEZ,G and CZAPLEWSKI,DA and OCOLA,L and SRINIVASAN,KA and STAVIS,SM and AKSYUK,VA and LIDDLE, JA and KRYLOV,S and ILIC, BR.", title="The Nanolithography Toolbox", journal="JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY", year="2016", volume="121", number="1", pages="464--475", doi="10.6028/jres.121.024", issn="1044-677X", url="https://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=4&SID=W2hKFfHmgNk3xhiPDY1&page=1&doc=1" }