Publication detail

INFLUENCE BOUNDARY LAYER IN THE DIFFERENTIALLY PUMPED CHAMBER

BÍLEK, M. HLAVATÁ, P. BAYER, R.

Original Title

INFLUENCE BOUNDARY LAYER IN THE DIFFERENTIALLY PUMPED CHAMBER

Type

conference paper

Language

English

Original Abstract

The goal of this thesis is the analysis of a gas flowing through the drain channels within the apertures of differentially pumped chamber of the Environmental Scanning Electron Microscope (ESEM). This thesis contains a verification of current simulation results of gas flow within the differentially pumped chamber published by D. Danilatos using Monte Carlo method in comparison with simulation results achieved by using simulation program ANSYS Fluent, which uses the mechanism of continuum for its calculations and where it was effect of the boundary layer taken into account.

Keywords

ANYSY Fluent, Environmental Scanning Electron Microscope, ESEM, Monte Carlo, Boundary layer, Wall Functions

Authors

BÍLEK, M.; HLAVATÁ, P.; BAYER, R.

Released

27. 4. 2017

Publisher

Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních

Location

Brno

ISBN

978-80-214-5496-5

Book

Proceedings of the 23rd Conference STUDENT EEICT 2017

Edition number

1

Pages from

496

Pages to

500

Pages count

5

BibTex

@inproceedings{BUT135732,
  author="Michal {Bílek} and Pavla {Šabacká} and Robert {Bayer}",
  title="INFLUENCE BOUNDARY LAYER IN THE DIFFERENTIALLY PUMPED CHAMBER",
  booktitle="Proceedings of the 23rd Conference STUDENT EEICT 2017",
  year="2017",
  number="1",
  pages="496--500",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních",
  address="Brno",
  isbn="978-80-214-5496-5"
}