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LAZAR, J. HOLÁ, M. FEJFAR, A. STUCHLÍK, J. KOČKA, J. OULEHLA, J. ČÍP, O.
Original Title
Displacement measurement with intracavity interferometry
Type
conference paper
Language
English
Original Abstract
We present a measuring technique for displacement and position sensing over a limited range with detection of standingwave pattern inside of a passive Fabry-Perot cavity. The concept considers locking of the laser optical frequency and the length of theFabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows to stabilize wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneities. Sensing of the interference maxima and minima within the cavity along the beam axis has been tested and proven with a low loss photoresistive photodetector based on a thin polycrystalline silicon layer. Reduction of losses wasachieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.
Keywords
antireflective coatings; Fabry Perot interferometers; interferometry; lasers; photodetectors; refractive index; silicon
Authors
LAZAR, J.; HOLÁ, M.; FEJFAR, A.; STUCHLÍK, J.; KOČKA, J.; OULEHLA, J.; ČÍP, O.
Released
1. 5. 2014
ISBN
0277-786X
Periodical
Proceedings of SPIE
State
United States of America
Pages from
913210:1
Pages to
6
Pages count