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BÍLEK, M. MAXA, J. HLAVATÁ, P. BAYER, R.
Original Title
Modelling and simulation of a velocity field within supersonic flows in low-pressure areas
Type
conference paper
Language
English
Original Abstract
This work deals with electron microscope vacuum chambers pumping in specific lowpressure conditions with a supersonic flow. One part of an environmental scanning electron microscope is the differentially pumped chamber. Until now the only way to calculate a supersonic flow within such specific conditions of a low-pressure, was by using statistic calculation method Monte Carlo, which however does not require the environment to have a continuous character. This work compares results achieved using continuum method with results published by Dr. Danilatos, who used the Monte Carlo method for his calculations.
Keywords
Dr. Danilatos, Monte Carlo, Knudsen number, Boundary layer, ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope
Authors
BÍLEK, M.; MAXA, J.; HLAVATÁ, P.; BAYER, R.
Released
30. 11. 2017
ISBN
978-80-214-5109-4
Book
ECS Transactions
1938-5862
Periodical
State
United States of America
Pages from
311
Pages to
316
Pages count
6
BibTex
@inproceedings{BUT140326, author="Michal {Bílek} and Jiří {Maxa} and Pavla {Šabacká} and Robert {Bayer}", title="Modelling and simulation of a velocity field within supersonic flows in low-pressure areas", booktitle="ECS Transactions", year="2017", journal="ECS Transactions", pages="311--316", doi="10.1149/08101.0315ecst", isbn="978-80-214-5109-4", issn="1938-5862" }