Publication detail
Impact of the shape of the differentially pumped chamber on critical flow character
HLAVATÁ, P. MAXA, J. BÍLEK, M. VYROUBAL, P.
Original Title
Impact of the shape of the differentially pumped chamber on critical flow character
Type
conference paper
Language
English
Original Abstract
The article deals with the impact of the shape of the differential pumped chamber of the Environmental electron microscope on resultant value of average Normalized density number on the path of the primary electron beam which has directly proportional influence on the dispersion of this beam and thereby influence on sharpness resulting image. Analysis were made using finite volume method in Ansys Fluent system with the respect to critical flow created behind the aperture which separates differential pumped chamber from specimen chamber.
Keywords
Dr. Danilatos, Monte Carlo, ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope
Authors
HLAVATÁ, P.; MAXA, J.; BÍLEK, M.; VYROUBAL, P.
Released
30. 11. 2017
Publisher
Electrochemical Society Inc.
ISBN
9781607688297
Book
ECS Transactions
Edition
81
Edition number
1
ISBN
1938-5862
Periodical
ECS Transactions
Year of study
81
Number
1
State
United States of America
Pages from
317
Pages to
322
Pages count
6
URL
BibTex
@inproceedings{BUT140360,
author="Pavla {Šabacká} and Jiří {Maxa} and Michal {Bílek} and Petr {Vyroubal}",
title="Impact of the shape of the differentially pumped chamber on critical flow
character",
booktitle="ECS Transactions",
year="2017",
series="81",
journal="ECS Transactions",
volume="81",
number="1",
pages="317--322",
publisher="Electrochemical Society Inc.",
doi="10.1149/08101.0317ecst",
isbn="9781607688297",
issn="1938-5862",
url="https://iopscience.iop.org/article/10.1149/08101.0317ecst/pdf"
}