Publication detail

Ideally Hexagonally Ordered TiO2 Nanotube Arrays

SOPHA, H. ŠAMOŘIL, T. PÁLESCH, E. HROMÁDKO, L. ZAZPE, R. ŠKODA, D. URBÁNEK, M. NG, S. PŘIKRYL, J. MACÁK, J.

Original Title

Ideally Hexagonally Ordered TiO2 Nanotube Arrays

Type

journal article in Web of Science

Language

English

Original Abstract

Ideally hexagonally ordered TiO2 nanotube layers were produced through the optimized anodization of Ti substrates. The Ti substrates were firstly covered with a TiN protecting layer prepared through atomic layer deposition (ALD). Pre-texturing of the TiN-protected Ti substrate on an area of 20V20 mm2 was carried out by focused ion beam (FIB) milling, yielding uniform nanoholes with a hexagonal arrangement throughout the TiN layer with three different interpore distances. The subsequent anodic nanotube growth using ethylene-glycol-based electrolyte followed the pre-textured nanoholes, resulting in perfectly ordered nanotube layers (resembling honeycomb porous anodic alumina) without any point defects and with a thickness of approximately 2 mm over the whole area of the pattern.

Keywords

anodization; focused ion beam milling; hexagonal ordering; TiN protecting layers; TiO2 nanotube layers

Authors

SOPHA, H.; ŠAMOŘIL, T.; PÁLESCH, E.; HROMÁDKO, L.; ZAZPE, R.; ŠKODA, D.; URBÁNEK, M.; NG, S.; PŘIKRYL, J.; MACÁK, J.

Released

1. 8. 2017

ISBN

2191-1363

Periodical

ChemistryOpen

Year of study

6

Number

4

State

Federal Republic of Germany

Pages from

480

Pages to

483

Pages count

4

BibTex

@article{BUT146382,
  author="Hanna Ingrid {Sopha} and Tomáš {Šamořil} and Erik {Pálesch} and Luděk {Hromádko} and Raul {Zazpe} and David {Škoda} and Michal {Urbánek} and Siowwoon {Ng} and Jan {Přikryl} and Jan M. {Macák}",
  title="Ideally Hexagonally Ordered TiO2 Nanotube Arrays",
  journal="ChemistryOpen",
  year="2017",
  volume="6",
  number="4",
  pages="480--483",
  doi="10.1002/open.201700108",
  issn="2191-1363"
}