Publication detail

Displacement interferometry with stabilization of wavelength in air

LAZAR, J., HOLÁ, M., CIP, O., CIZEK, M., HRABINA, J., BUCHTA, Z.

Original Title

Displacement interferometry with stabilization of wavelength in air

Type

journal article - other

Language

English

Original Abstract

We present a concept of suppression of the influence of variations of the refractive index of air in displacement measuring interferometry. The principle is based on referencing of wavelength of the coherent laser source in atmospheric conditions instead of traditional stabilization of the optical frequency and indirect evaluation of the refractive index of air. The key advantage is in identical beam paths of the position measuring interferometers and the interferometer used for the wavelength stabilization. Design of the optical arrangement presented here to verify the concept is suitable for real interferometric position sensing in technical practice especially where a high resolution measurement within some limited range in atmospheric conditions is needed, e.g. in nanometrology.

Keywords

Instrumentation, measurement and metrology, interferometry

Authors

LAZAR, J., HOLÁ, M., CIP, O., CIZEK, M., HRABINA, J., BUCHTA, Z.

Released

29. 11. 2012

ISBN

1094-4087

Periodical

OPTICS EXPRESS

Year of study

20

Number

25

State

United States of America

Pages from

27830

Pages to

27837

Pages count

8

BibTex

@article{BUT146740,
  author="Josef {Lazar} and Miroslava {Holá} and Ondřej {Číp} and Martin {Čížek} and Jan {Hrabina} and Zdeněk {Buchta}",
  title="Displacement interferometry with stabilization of wavelength in air",
  journal="OPTICS EXPRESS",
  year="2012",
  volume="20",
  number="25",
  pages="27830--27837",
  issn="1094-4087"
}