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Publication detail
Sobola D.S., Dallaev R.S., Orlova L.A.
Original Title
Role of higly oriented pyrolytic graphite in nanofabrication
Type
conference proceedings
Language
English
Original Abstract
Highly oriented pyrolytic praphite has recommended itself as a calibration material for the methods of scanning probe microscopy. However, its electrical and optical properties make it also interesting material for the preparation of nanostructures. This work describes the mechanically processed surfaces of graphite for subsequent use as substrates for depositing of thin films of semiconductor materials.
Keywords
microscopy, topography, atomically clean surface
Authors
Released
6. 4. 2018
ISBN
978-5-00128-041-5
Book
Actual problems of road traffic education and prospects of development of the industry
Pages from
333
Pages to
336
Pages count
4
BibTex
@proceedings{BUT147118, editor="Rashid {Dallaev} and Dinara {Sobola}", title="Role of higly oriented pyrolytic graphite in nanofabrication", year="2018", pages="333--336", isbn="978-5-00128-041-5" }