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PRÁŠEK, J. VANČÍK, S. SVATOŠ, V. KLEMPA, J. GABLECH, I. PYTLÍČEK, Z. LEVEK, V.
Original Title
MEMS Microhotplates for Chemical Sensors
Type
conference paper
Language
English
Original Abstract
In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations.
Keywords
microhotplate; MEMS; micromachining; gas sensor
Authors
PRÁŠEK, J.; VANČÍK, S.; SVATOŠ, V.; KLEMPA, J.; GABLECH, I.; PYTLÍČEK, Z.; LEVEK, V.
Released
21. 8. 2018
Publisher
IEEE Computer Society
Location
Serbia
ISBN
9781538657317
Book
41st International Spring Seminar on Electronics Technology ISSE2018
2161-2528
Periodical
Electronics Technology (ISSE)
Year of study
2018
State
United States of America
Pages from
1
Pages to
5
Pages count
BibTex
@inproceedings{BUT150735, author="Jan {Prášek} and Silvester {Vančík} and Vojtěch {Svatoš} and Jaroslav {Klempa} and Imrich {Gablech} and Zdeněk {Pytlíček} and Vladimír {Levek}", title="MEMS Microhotplates for Chemical Sensors", booktitle="41st International Spring Seminar on Electronics Technology ISSE2018", year="2018", journal="Electronics Technology (ISSE)", volume="2018", pages="1--5", publisher="IEEE Computer Society", address="Serbia", doi="10.1109/ISSE.2018.8443768", isbn="9781538657317", issn="2161-2528" }