Publication detail

Precise evaluation system for monolithic tungsten wire manufacture

KADLEC, J.

Original Title

Precise evaluation system for monolithic tungsten wire manufacture

Type

conference paper

Language

English

Original Abstract

This paper covers precise evaluation system for monolithic tungsten wire manufacture. This device is designed in order to analyze and control optimal cathode etching process. Main function of this control unit is to control position system, measure etching current and temperature and control cathode etching process.

Key words in English

Precise evaluation system, monolithic tungsten wire, industrial process

Authors

KADLEC, J.

RIV year

2005

Released

1. 1. 2005

Publisher

Ing. Zdeněk Novotný CSc., Brno

Location

Brno, Czech Republic

ISBN

80-214-2990-9

Book

Electronic Devices and Systems IMAPS CS International Conference 2005

Pages from

31

Pages to

33

Pages count

3

BibTex

@inproceedings{BUT15210,
  author="Jaroslav {Kadlec}",
  title="Precise evaluation system for monolithic tungsten wire manufacture",
  booktitle="Electronic Devices and Systems IMAPS CS International Conference 2005",
  year="2005",
  pages="3",
  publisher="Ing. Zdeněk Novotný CSc., Brno",
  address="Brno, Czech Republic",
  isbn="80-214-2990-9"
}